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P: Fachverband Plasmaphysik

P 23: Low Temperature Plasmas

P 23.1: Poster

Mittwoch, 15. März 2017, 16:30–18:30, HS Foyer

Kinetic Modeling of the Surface Mode Excitation in CCP Discharges with the Electrostatic and Electromagnetic Field Descriptions — •Denis Eremin, Ali Arshadi, Schabnam Naggary, and Ralf Peter Brinkmann — Institute for Theoretical Engineering, Ruhr University Bochum, Univeristätsstrasse 150, 44801, Bochum, Germany

It has been recently demonstrated that uniformity of the plasma density and ion fluxes impinging on the electrodes in large-scale CCP reactors operated at very high frequencies can be linked to excitation of the surface modes supported by such reactors filled with plasma. There are two types of such modes, which can be distinguished by the physical phenomena associated with them, the plasma-series-resonance (PSR) and the self-bias (SB) modes. In this work excitation of these modes and their influence on the plasma uniformity is investigated by means of self-consistent particle-in-cell/Monte-Carlo (PIC/MCC) simulations in the electrostatic and the electromagnetic limits. In the latter case a novel implicit PIC/MCC energy-conserving approach is employed, which helps to get rid of numerical heating. The particle algorithms of the corresponding codes are massively parallelized on GPU.

The authors gratefully acknowledge financial support of the German Research Foundation within the framework of SFB-TR 87 project.