Dresden 2017 – scientific programme

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DF: Fachverband Dielektrische Festkörper

DF 13: SYNS - Symposium Nanostructuring Beyond Conventional Lithography
(MI with DS, DF, HL, MM and VA)

Wednesday, March 22, 2017, 15:00–17:45, HSZ 02

	15:00	DF 13.1	Invited Talk: The Limits to Lithography: How Electron-Beams Interact with Materials at the Smallest Length Scales — •Karl K. Berggren
	15:30	DF 13.2	Invited Talk: High precision fabrication for light management at nanoscale — •Saulius Juodkazis and Armandas Balcytis
	16:00	DF 13.3	Invited Talk: Directed self-assembly of performance materials — •Paul Nealey
	16:30		15 min. break
	16:45	DF 13.4	Invited Talk: Nanometer accurate topography patterning using thermal Scanning Probe Lithography — •Armin W. Knoll
	17:15	DF 13.5	Invited Talk: High resolution 3D nanoimprint lithography — •Hartmut Hillmer