Dresden 2017 – scientific programme
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DF: Fachverband Dielektrische Festkörper
DF 14: Various Topics II
DF 14.1: Talk
Wednesday, March 22, 2017, 15:00–15:20, GER 37
Applying of UV and IR nanosecond laser radiation for the nanostructuring of dielectric surfaces — •Pierre Lorenz, Igor Zagoranskiy, Lukas Bayer, Joachim Zajadacz, and Klaus Zimmer — Leibniz-Institut für Oberflächenmodifizierung e. V., Permoserstr. 15, 04318 Leipzig, Germany
Dielectric nanostructures have a widespread field of applications. However, a fast and cost-effective production is still a challenge. Laser structuring methods using self-organized processes can solve the technological difficulties. The so-called ISPM-LIFE (laser-induced front side etching using in-situ pre-structured metal layer) method allows the nanostructuring of dielectric surfaces assisted by a laser-induced nanostructured metal film. The IPSM-LIFE can be separated into two steps: First, a low laser fluence treatment results in a nanopattern formation of the metal film, caused by instabilities of a thin molten metal. Second, a high-fluence treatment of the pre-structured metal film results in nanostructuring of the dielectric surface. Different metal layer (Cr, Mo, Ti) / dielectric substrate (fused silica, sapphire, BK7) systems were tested with UV laser (KrF excimer laser λ = 248 nm, Δ tp = 25 ns, f = 1−200 Hz) and IR laser (fiber laser λ= 1064 nm, Δ tp = 1−600 ns with a time resolution of 1 ns, f = 2−100 kHz). The resultant structures were investigated by atomic force (AFM) and scanning electron microscopy (SEM). The structuring process was simulated using a heat equation to describe the laser-heating of the solid and a kind of Navier-Stokes equation to describe the mass transport in the liquid.