Dresden 2017 – wissenschaftliches Programm
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DF: Fachverband Dielektrische Festkörper
DF 9: Poster Session
DF 9.11: Poster
Dienstag, 21. März 2017, 14:00–16:00, P1C
Sub-micrometer structuring of sapphire surface applying nanosecond IR laser irradiation — •Igor Zagoranskiy, Pierre Lorenz, Lukas Bayer, and Klaus Zimmer — Leibniz-Institut für Oberflächenmodifizierung e. V., Permoserstr. 15, 04318 Leipzig, Germany
Laser treatment of surfaces finds nowadays a lot of applications. It is also possible to fabricate various, periodic and stochastic micrometer and nanometer structures into substrate surfaces. By modifying of dielectric surfaces the IPSM-LIFE methodic (laser-induced front side etching using in situ pre-structured metal structures) was developed and optimized in applying the fiber laser with wavelength of 1064 nm and adjustable pulse duration from 1 to 600 ns. The IPSM-LIFE includes 2 steps. First step is laser induced pre-structuring of metal layer, which covered dielectric surface. In the second step the produced metal structures are transferred into dielectric substrate. As example 10 nm molybdenum covered sapphire (Al2O3 (1-102)) wafer was tested. Modified dielectric surfaces were analyzed by atomic force (AFM) and scanning electron microscopy (SEM) as well as contact angle measurements. Down to nanometer scale the resultant surface topography can be adjusted due to variation of follow laser parameter: number of pulses, pulse duration and fluence.