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DS: Fachverband Dünne Schichten
DS 16: Layer Properties: Electrical, Optical, and Mechanical Properties I
DS 16.3: Vortrag
Montag, 20. März 2017, 17:30–17:45, CHE 91
The study of interaction, nonlinear and dissipation effects in nanomembranes by investigating the dispersion relations of bending waves — •Fan Yang1, Reimar Waitz2, and Elke Scheer1 — 1Universität Konstanz, Konstanz 78457, Germany. — 2Rational AG, 86889 Landsberg am Lech, Germany.
Deciphering the mode shapes of vibrations of nanopatterned membranes is paving the way for applications of nanoscale membranes which rely on particular properties of vibrational excitations. The mode shape of bending waves in thin membranes is measured as a function of space and time, using a phase-shift interferometer with continuous and stroboscopic light. We develop a method to separate the contribution of the excitation system from the measured amplitude in order to obtain the contribution of the membrane itself. The eigen-frequencies and the Q factor of the membrane can be obtained as well. With this method we are able to determine the dispersion relation of membrane oscillations in a frequency range from their ground mode up to 12 MHz. For membranes with an inhomogeneous stress, an algorithm to obtain a map of the lateral stress tensor components is presented. The study of the temperature dependent vibration behavior reveals an expected temperature dependence of the mechanical properties of a prestressed nanomembrane. Mechanical properties of different designed nanopattern-membranes are investigated by using our method.