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DS: Fachverband Dünne Schichten

DS 21: Thin Film Characterisation: Structure Analysis and Composition II

DS 21.10: Vortrag

Dienstag, 21. März 2017, 12:00–12:15, CHE 91

Quantitative Raman spectroscopy of doped and undoped multiphase TiO₂ thin films on complex substrates — •Sebastian Schipporeit^1,2,3, Dieter Mergel¹, and Volker Buck^1,2 — ¹Thin Film Technology Group, Faculty of Physics, University Duisburg-Essen — ²CENIDE, Duisburg — ³University of Wuppertal, School of Mechanical Engineering and Safety Engineering, Material Technology, Wuppertal

We have developed a method that allows a quantification of crystal structures in thin films on complicated substrates with Raman spectroscopy. This method was applied to pure and Nb-doped TiO₂ thin films, deposited by various coating techniques onto B270 glass. The films were deposited or post-heated between 60 ^∘C and 650 ^∘C Raman maps were created within areas of 30 x 30 µm in 250 nm steps. This gives the possibility to determine the spatial distribution of crystal phases within the films and to enhance the signal to noise ratio. We decompose the spectra into the two main components substrate and film, and furthermore the spectrum of the film into an amorphous content, crystalline backgrounds and, finally, the Raman peaks of the various crystal phases. Modelling the whole spectrum eliminates any arbitrary background allowing even small traces of crystalline phases to be detected. The films contain amorphous, anatase, rutile and brookite structures.