Dresden 2017 – scientific programme
Parts | Days | Selection | Search | Updates | Downloads | Help
DS: Fachverband Dünne Schichten
DS 27: 2D Materials beyond Graphene (jointly with O)
DS 27.19: Poster
Tuesday, March 21, 2017, 18:30–20:30, P2-EG
Imaging Mueller Matrix Ellipsometry for the Characterization of Microstructured Anisotropic Thin-Film Samples — Matthias Duwe1, Sebastian Funke1, Christian Röling1, •Peter H. Thiesen1, Aday J. Molina-Mendoza2, and Andres Castellanos-Gomez3 — 1Accurion GmbH, Stresemannstr. 30, 37079 Göttingen, Germany — 2Universidad Autonoma de Madrid. Departamento de Fisica de la Materia Condensada. Campus Universitario de Cantoblanco, 28049 Madrid, Spain — 3IMDEA Nanoscience, C/ Faraday 9, Campus Universitario de Cantoblanco, 28049 Madrid, Spain
Imaging ellipsometry (IE) is an established technique for the characterization of structured thin-film samples with lateral resolutions down to the micron scale. In most cases, however, imaging ellipsometers featuring microscopic resolution only yield the ellipsometric angles Δ and Ψ. Thus, these ellipsometers mainly have been applied to isotropic samples so far. Here, we present imaging Mueller matrix ellipsometry (IMME) with high microscopic lateral resolution capable of measurements at a variable angle of incidence. By operating Accurion*s imaging ellipsometer EP4 (PCSA configuration) in a rotating-compensator mode, the ellipsometer yields Mueller matrix micrographs for the upper 3x4 matrix elements of the sample. We applied this imaging Mueller matrix ellipsometer to the characterization of microscopic flakes of anisotropic 2D-materials, such as black phosphorus.