Dresden 2017 – scientific programme

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DS: Fachverband Dünne Schichten

DS 3: Thin Film Characterisation: Structure Analysis and Composition I

DS 3.4: Talk

Monday, March 20, 2017, 10:15–10:30, CHE 91

Multiparamter Characterization of Subnanometre Cr/Sc Multilayers Based on Complementart Measurements — •Anton Haase¹, Saša Bajt², Philipp Hönicke¹, Victor Soltwisch¹, and Frank Scholze¹ — ¹Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany — ²Photon Science, DESY, Notkestr, 85, 22607 Hamburg, Germany

Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses below <1 nm, is attainable by the combination of several analytical techniques. We used EUV and X-ray reflectance measurements, resonant EUV reflectance across the Sc L edge, as well as X-ray standing wave fluorescence measurements. The parameters of our multilayer model were determined based on a particle swarm optimizer and validated using a Markov-chain Monte Carlo maximum likelihood approach. For the determination of the interface roughness, diffuse scattering measurements were conducted.