Dresden 2017 – scientific programme

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DS: Fachverband Dünne Schichten

DS 36: Postersession I

DS 36.34: Poster

Wednesday, March 22, 2017, 17:00–19:00, P2-EG

Noble gas ion-induced pattern formation on indium oxide thin films — •Hans Hofsäss, Omar Bobes, and Ronja Langendorf — Fakultät für Physik, Universität Göttingen, Göttingen, Germany

Formation of self-organized surface patterns by noble gas ion irradiation has been studied in the past. Ripple pattern formation on oxides was mainly investigated for fused silica [1], sapphire [2] and also Indium-Tin-oxide (ITO) [3]. Whereas silica and sapphire exhibits the expected behavior regarding ripple formation, ripple formation on ITO was investigated only for grazing incidence, where parallel ripple were observed. It was conclude that crystallinity plays a crucial role for pattern formation on ITO [3]. We studied the pattern formation on ITO for 1 keV Ar and Xe ion irradiation and a broad range on ion incidence angles. We find flat surfaces except for grazing ion incidence where perpendicular ripples similar to [2] are observed. Results for ion irradiation at lower ion energy will be presented. We compare the existing data for silica, sapphire and ITO with predictions from linear theories, where we use curvature coefficients determined from Monte Carlo simulations. The simulation results are in good quantitative agreement with the experiments done with silica and sapphire but not for ITO.

[1] A. Keller et al., J. Phys.: Condens Matter 21 (2009) 495305

[2] H. Zhou et al., Phys. Rev. B 78 (2008) 165404

[3] T. Škereň et al., Thin Solid Films 589 (2015) 315