Dresden 2017 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 36: Postersession I
DS 36.47: Poster
Mittwoch, 22. März 2017, 17:00–19:00, P2-EG
On-chip lateral anodic oxidation of titanium — •Daniela Welk, Svenja Herbertz, Thomas Heinzel, Paulus Aleksa, and Mara Zielinski — Solid State Physics Laboratory, Heinrich-Heine-Universität Düsseldorf
We demonstrate that it is possible to generate and increase the width of a TiOx line in a Ti film by application of a DC voltage. The process has the character of an on-chip anodic oxidation and can be used to generate as well as tune electronic circuit elements on-chip. During oxidation, the TiOx line changes its width, height, roughness and resistance. This growth of the oxide is studied under different ambient conditions.