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DS: Fachverband Dünne Schichten

DS 44: Postersession II

DS 44.20: Poster

Donnerstag, 23. März 2017, 17:00–19:00, P1C

Microstructure and Stress Gradients in Diamond Films Revealed by Cross section X-ray nanodiffraction — •Nicolas Wöhrl¹, Hadwig Sternschulte², Manfred Burghammer³, Juraj Todt⁴, and Jozef Keckes⁴ — ¹Faculty of Physics and CENIDE, University of Duisburg- Essen, Lotharstr. 1, 47057 Duisburg, Germany — ²Hochschule Augsburg, Fakultät für Allgemeinwissenschaften, Augsburg, Germany — ³ESRF, Grenoble, France — ⁴Erich Schmidt Institut and Montanuniversität Leoben, Leoben, Austria

Ultrananocrystalline diamond (UNCD) films consist of small randomly oriented diamond grains embedded in an amorphous C:H matrix. Usually, the grain size is determined by X-ray diffraction (XRD) or transmission electron microscopy revealing information only from the total UNCD film or only locally from selected areas with low statistics, respectively. In this work we present the first cross section X-ray nanodiffraction study of diamond multi-layers with varying grain size from microcrystalline to UNCD. For the cross section study the samples have been cut in thin slices by FIB. The X-ray nanodiffraction was performed in transmission geometry at the ESRF in Grenoble using X-ray beam of 30nm in a diameter adjusted parallel to the Diamond-Si interface and the sample scanned in steps from the interface to the growth surface. The 2D XRD patterns recorded by a CCD detector were used to evaluate depth gradients of texture, grain sizes and residual stress in the diamond crystals. The results show complex gradients of microstructure and stresses. [1] J. Keckes et al., Scripta Materialia 67 (2012) 748