Dresden 2017 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 44: Postersession II
DS 44.22: Poster
Donnerstag, 23. März 2017, 17:00–19:00, P1C
Epitaxial thin films of the high-k dielectric SrZrO3 — •Corinna Müller, Patrick Salg, Aldin Radetinac, Philipp Komissinskiy, and Lambert Alff — Technische Universität Darmstadt, Germany
SrZrO3 has an orthorhombic perovskite crystal structure with a pseudocubic lattice constant of 4.101 Å, a high-k dielectric constant (∼ 22), a large optical bandgap (∼ 5.8 eV), and a low oxygen diffusion constant of 10−12 cm2s−1 [1,2]. We have investigated the growth of SrZrO3 thin films fabricated by pulsed laser deposition onto GdScO3 substrates at a substrate temperature of 630-700 ∘C, laser fluence of 0.32-0.98 J/cm2, and oxygen partial pressure below 10−8 Torr. X-ray diffraction measurements reveal that the crystal structure of SrZrO3 is rather stable against variation of the growth parameters. The 20-70 nm thick films are relaxed and show lattice parameters close to the SrZrO3 bulk values. It is investigated how the Sr:Zr cation stoichiometry of the films depends on laser fluence which is important as Sr and Zr vacancies act as acceptor defects [2].
[1] P. A. Langjahr et al., Mater. Res. Soc. Symp. Proc. 401, 109 (1996). [2] L. Weston et al., Phys. Rev. B 89, 184109 (2014).