Dresden 2017 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 44: Postersession II

DS 44.30: Poster

Donnerstag, 23. März 2017, 17:00–19:00, P1C

Texture Optimization and Structure-Property Relationships in Chalcogenide Thin Films — •Matthias Maximilian Dück, Stefan Jakobs, Tobias Schäfer, Carolin Jacobi, Felix Lange, and Matthias Wuttig — I. Physikalisches Institut (IA), RWTH Aachen University, D-52056 Aachen, Germany

Chalcogenides along the pseudobinary line between GeTe and Sb₂Te₃ are currently gaining much attention, since a number of interesting properties can be attributed to certain members of that material group. Amongst these compounds, phase-change materials, thermoelectric materials, topological insulators and superconductors are found. Especially for the latter two, a large correlation between functionality and film quality has been observed. With the incorporation of a new sputter setup in a UHV cluster tool featuring a variety of analytic capabilities, access to a large parameter space for the deposition of chalcogenide systems was gained. This allows to push the boundaries in terms of film quality achieved in the sputter process. That way, a compromise between the strengths of MBE (film quality) and sputter deposition (industrial relevance) is found. This study focuses on the optimization of phase-change material thin films with respect to film quality and texture. The films are thoroughly characterized by a variety of methods, enabling the detailed investigation of film quality, texture and structure-property relationships.