Dresden 2017 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 44: Postersession II

DS 44.42: Poster

Donnerstag, 23. März 2017, 17:00–19:00, P1C

Preparation of Epitaxial PMN-PT Films on Si-based Templates for Electrocaloric Studies — •Robert Kuhrt^1,2, Michael Mietschke^1,2, Christian Molin⁴, Sylvia Gebhardt⁴, Matthijn Dekkers³, Kornelius Nielsch^1,2, and Ruben Hühne¹ — ¹IFW Dresden, Germany — ²Technische Universität Dresden, Germany — ³Solmates B.V., Enschede, Netherlands — ⁴Department of Smart Materials and Systems, Fraunhofer Institute for Ceramic Technologies and Systems, Dresden, Germany

Ferroelectric materials that show a strong electrocaloric (EC) effect near a phase transition are subject of current research. These materials show a temperature change when applying an electric field adiabatically which makes them suitable for solid state coolers. One prominent example are Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ (PMN-PT) compounds, which show a high EC effect over a broad temperature range close to room temperature. An integration of these materials into semiconductor architectures might open up new opportunities for cooling sensors or other device structures.

Therefore, epitaxial 0.9PMN-0.1PT films were grown on (001)-oriented SrTiO₃ buffered Si wafers by pulsed laser deposition with conducting interlayers as electrodes. Epitaxy, phase purity and surface topography were studied using XRD and AFM. The ferroelectric properties were determined by temperature dependent global polarization measurements as well as local piezo response force microscopy.