Dresden 2017 – scientific programme

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DS: Fachverband Dünne Schichten

DS 44: Postersession II

DS 44.54: Poster

Thursday, March 23, 2017, 17:00–19:00, P1C

Development of quantitative Reflectance Anisotropy Microscopy — •Timo Seemke, Eugen Speiser, Johannes Falkenburg, Maciej D. Neumann, and Norbert Esser — Leibniz-Institut für Analytische Wissenschaften -- ISAS -- e.V., Department Berlin, Schwarzschildstraße 8, 12489 Berlin, Germany

Reflectance anisotropy microscopy (RAM) is a technique that monitors the optical anisotropy of surfaces with spatial resolution and provides information about crystal orientation and local strain on the surface.

Often, technologically relevant materials are not transparent, thus transmittance based polarization- or phase microscopy methods are not an option for measuring spatially resolved, low amplitude surface anisotropy. Common reflectance based methods depend on beam-splitting elements that do not fully conserve polarization states. Other common methods make use of a Foster prism polarizing beamsplitter, that detect only the depolarization by the surface and do not measure the anisotropy quantitatively. A third widely used approach is to separate the incoming and outgoing light beam by using a small angle of incidence to the surface, which severely limits the use of high spatial resolution optics.

We present a new RAM setup for quantitative and spatially resolved measurements of optical anisotropy with a signal to noise ratio comparable to common, non-spatially resolved Reflectance Anisotropy Spectroscopy (RAS) methods. Spatial resolution in the micrometer range was achieved in a spectral range from UV to near IR. RAM measurements on wide-bandgap oxide- and nitride-semiconductors surfaces as well as on periodic microstructures will be discussed.