Dresden 2017 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 64: Poster: Photovoltaics and Optics

HL 64.8: Poster

Mittwoch, 22. März 2017, 15:00–19:00, P1C

Influence of long chain carboxylates as precursor on the performance of ZnO TFTs — •Jonas Köhling and Veit Wagner — Jacobs University Bremen, Campus Ring 1, 28759 Bremen, Germany

To produce ZnO TFTs with good morphological and electrical properties the need for very high deposition temperatures is the bottle neck for using bendable substrates like polyimides. Long chain carboxylates are known as ZnO precursors with low decomposition temperature. In this study ZnO films with thicknesses below 30 nm were deposited by spray pyrolysis at various temperatures and varying the chain length of the carboxylates. In addition UV/ozone treatment was used to decompose remaining organic ligands and residues. The deposited ZnO films were systematically characterized by XPS, AFM, UV-VIS, and Raman measurements. Finally TFTs were fabricated and exhibit mobilities beyond 10 cm²/Vs for proper deposition conditions.