Dresden 2017 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 79: Poster: New Materials
HL 79.3: Poster
Donnerstag, 23. März 2017, 15:00–19:00, P2-OG3
UHV nanopositioning system for close to surface nitrogen implantation in diamond — •Stefan Borgsdorf1, Ulrich Köhler1, Tanmoy Chakraborty2, and Dieter Suter2 — 1Experimentalphysik IV, AG Oberflächen, Ruhr- Universität Bochum, Germany — 2Experimentelle Physik IIIA, Technische Universität Dortmund, Germany
Color centers in diamond, especially nitrogen vacancy (NV) centers, are practical single photon emitters due to RT operation and are candidates for applications in quantum computing and are elements for quantum information technologies. We present a setup for low energy implantation of NV centers near to the surface with a lateral resolution from micrometer to nanometer scale. The lateral resolution is achieved by a closed loop nanopositioning system combined with an exchangeable aperture with diameters between a micrometer down to a few nanometer. The system allows us to heat the sample up to 900 °C in UHV while implanting with nitrogen without any graphitization on the surface.