Dresden 2017 – scientific programme

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HL: Fachverband Halbleiterphysik

HL 79: Poster: New Materials

HL 79.4: Poster

Thursday, March 23, 2017, 15:00–19:00, P2-OG3

Macro- and micro-scale investigation of diamond etching — •Meng Ge, Christian Osterkamp, Fedor Jelezko, and Alexander Kubanek — Institute for Quantum Optics, Ulm University, D-89081 Ulm, Germany

Diamonds have special usage in quantum information science and technology. The existence of the negatively charged nitrogen-vacancy (NV) centers in diamond, whose electron spin can be coherently manipulated by microwave, are very good candidates for single photon sources, nano-scale magnetic and electric field sensors, and quantum bits (qubits). For many applications good optical and spin properties are required in micro-and nanostructured diamond devices. In order to fulfill this aim and provide a smooth and uniform method, plasma processes are employed. During our research, we focus on both the SF6 and the O2 inductively coupled plasma (ICP) processes.We optimize etching process towards fabrication of diamond nano-structures. A confocal microscope is used for characterizing NV centers in our diamond before and after the diamond structuring procedure.