Dresden 2017 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe

HL: Fachverband Halbleiterphysik

HL 87: Carbon: Diamond and others

HL 87.9: Vortrag

Freitag, 24. März 2017, 12:00–12:15, POT 06

Fabrication of Dense Arrays of Nanocrystalline Diamond Nanopillars — •Alexander Schmidt, Johann Peter Reithmaier, and Cyril Popov — Institute of Nanostructure Technologies and Analytics, Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany

One-dimensional diamond nanostructures, namely diamond nanopillars, have been prepared using nanocrystalline diamond (NCD) films as starting material. The fabrication process of arrays of nanopillars consisted of their definition by electron beam lithography (EBL) applying gold as a hard mask material and subsequent inductively coupled plasma reactive ion etching (ICP-RIE) with oxygen. Three different pillar diameters were investigated, namely 200, 100 and 50 nm, with different lateral distances ranging from 100 nm to 400 nm in order to determine the minimal resolution, which could be defined depending on the variation of a major process parameter in the EBL process -- namely the exposure dose. Furthermore, its influence on the resulting shape of the pillars was investigated. The integration of NV centers within the fabricated diamond nanopillars either during the film growth or by follow-up ion implantation can be used to develop quantum memories.