Dresden 2017 – wissenschaftliches Programm

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MA: Fachverband Magnetismus

MA 7: Analytical Electron Microscopy: SEM and TEM-based Material Analysis

MA 7.6: Vortrag

Montag, 20. März 2017, 11:45–12:00, MER 02

Analysis on nanostructures and samples with high topography using low acceleration voltages — •Max Patzschke — Bruker Nano, Berlin, Germany

Continuing technological advances require the elemental analysis of increasingly smaller structures in many industrial fields, including biological applications, semiconductors, and nanotechnology in general. This confronts the otherwise well proven electron microscope based energy dispersive spectroscopy (EDS) with new challenges. Most of these challenges are due to physical conditions, such as limited resolution and radiation yield in the low energy range requiring the analysis on bulk samples with low accelerating voltages. The necessary of low probe current would give low X-ray count rates with traditional EDX detectors, and only low to intermediate energy X-ray lines with many peak overlaps can be evaluated.

The XFlash FlatQUAD Silicon Drift Detector (SDD) allowing us to overcome these limitations, and offering additional benefits. Using the FlatQuad detector with low accelerating voltages, the element distribution of nanometer-sized structures can be displayed in a short time. Peaks with several overlapping elements (e.g. Co-L, Ni-L, Fe-L) can be deconvolved using the improved atomic database with 250 additional L,M and N lines below 4 keV.

Examples for nanotechnological applications will be presented: mapping of nanoparticles down to 4nm, biological application, samples with high topography and specimen where sample preparation like coating is excluded.