Dresden 2017 – scientific programme

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MI: Fachverband Mikrosonden

MI 1: Analytical Electron Microscopy: SEM and TEM-based Material Analysis

MI 1.2: Talk

Monday, March 20, 2017, 10:30–10:45, MER 02

The Complicated Information Depth of EBSD — •Wolfgang Wisniewski — Otto-Schott-Institut, Fraunhoferstr. 6, 07743 Jena, Germany

The information volume of a method enables to estimate which part of a sample actually contributes to the given measurement and establishes boundaries concerning possible measurements. In the case of EBSD, the widespread opinion is that the information depth is limited to 10-40 nm or less. However, recent results show that this information depth depends not only on the material and the available technology, but also on the quality of the pattern being analyzed. In high quality patterns, the evaluated information indeed originates from a very thin layer of material, but the information depth may increase significantly for low quality EBSD-patterns. This aspect e.g. expands the possibilities of EBSD-measurements to materials covered by passivation layers.