Dresden 2017 – scientific programme

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MI: Fachverband Mikrosonden

MI 1: Analytical Electron Microscopy: SEM and TEM-based Material Analysis

MI 1.5: Talk

Monday, March 20, 2017, 11:30–11:45, MER 02

Angle-resolved X-ray fluorescence spectroscopy for elemental depth profiling with nanometer resolution — •Ioanna Mantouvalou, Jonas Baumann, Veronika Swedowski, Malte Spanier, Steffen Staeck, Daniel Grötzsch, Wolfgang Malzer, and Birgit Kanngießer — Institut für Optik und atomare Physik, Technische Universität Berlin, Deutschland

X-ray fluorescence (XRF) spectroscopy is a well-established analytical tool for the non-destructive investigation of elemental distributions. Typically, the measured fluorescence intensities are converted to elemental concentrations using tabulated atomic cross sections, thus rendering reference-free quantification feasible. With adapted X-ray lenses lateral micro- or even nano-analysis is possible. Depth information, though, is not readily available. Recent development is directed toward angle-resolved (AR) XRF for the derivation of elemental depth profiles with nm resolution. Here, the angle of incidence or emission is varied, thereby changing the fluorescence information depth. The comparison of measured and simulated angular profiles yields information about the stratigraphy of technologically relevant specimen such as multilayer structures, solar cells or transistor gate stacks. We present our lab-based instrumentation in the soft and hard X-ray range. With a flexible spectroscopy chamber and various sources (X-ray tubes, laser-produced plasma source) and detectors (SDD, CCD) AR and especially grazing emission measurements show the feasibility of the analysis independent on large scale facilities such as synchrotron radiation sources.