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MI: Fachverband Mikrosonden

MI 5: Session on Nanostructuring Beyond Conventional Lithography

MI 5.1: Vortrag

Mittwoch, 22. März 2017, 11:30–11:45, MER 02

X-ray waveguide optics — •Sarah Hoffmann-Urlaub, Mike Kanbach, Hsin-Yi Chen, and Tim Salditt — Institut für Röntgenphysik,Georg-August Universität, Friedrich-Hund Platz 1, 37077 Göttingen

Virtual x-ray sources as provided by channel waveguides exhibit nanoscale sizing [1] as well as a high degree of coherence. We report on imaging experiments and the fabrication process of these hard x-ray waveguides deployed at the synchrotron sources at DESY and ESRF. Among nother techniques e-beam lithography, reactive ion etching and Silicon wafer bonding are involved within the fabrication of two-dimensional, sub-100 nm sized waveguide channels. Both waveguide geometry [2] and material [3] can be adapted to meet the requirements of a specific experiment, such as the photon energy (7.9-17.5 keV), the desired source size, or the application of a reference beam in a holography setup [4].

[1] H. Neubauer et al., J. Appl. Phys. 115, 214305 (2014)

[2] H.-Y. Chen, et al. Appl. Phys. Lett. 106(19), 194105 (2015)

[3] S. Hoffmann-Urlaub, et al. Microelec. Eng. 164: 135-138. (2016)

[4] S. Hoffmann-Urlaub, et al. Acta Cryst. A, 72.5 (2016)