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MI: Fachverband Mikrosonden

MI 5: Session on Nanostructuring Beyond Conventional Lithography

MI 5.6: Vortrag

Mittwoch, 22. März 2017, 13:00–13:15, MER 02

Transmission Helium Ion Microscopy — Christoph Herrmann and •Karen L. Kavanagh — Dept. Physics, Simon Fraser University, Burnaby, BC V5A 1S6 Canada

The application of a Si p-i-n detector array (Modupix) for the imaging of a coherent helium ion beam (25 keV, Zeiss nanofab) is described. The beam intensity as a function of ion current, aperture size, spot size, focus condition, and gas pressure have been investigated. The transmission through thin films (Si, Al, C and polymers) have been imaged with a lateral resolution of 5 microns, limited by the detector pixel size (55 microns) and distance below the sample (15 cm). The potential for the detection of ion milling rates, diffraction and channeling is discussed.