Dresden 2017 – scientific programme

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MI: Fachverband Mikrosonden

MI 7: Poster: Microanalysis and Microscopy

MI 7.8: Poster

Wednesday, March 22, 2017, 18:00–20:00, P4

Source, accelerator and micro-beam line upgrade of the Göttingen proton beam writing facility at MaRPel — •Alrik Stegmaier, Hans Hofsäss, Stefan Nießner, Clemens Beckmann, and Ulrich Vetter — 2. Physikalisches Institut, Georg-August-Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen

The MaRPel (Materials Research Pelletron) accelerator was first used successfully for Nitrogen and Hydrogen depth profiling in RNRA [1,2].

Since then it has undergone many upgrades. It currently consists of a 3 MV NEC-Pelletron, a SNICS (Source for Negative Ions through Cesium Sputtering), a station for ion source development and three beam-lines that can be used for RBS, RNRA, in-air-RBS and PIXE, high energy ion implantation and the micro-beam line.

Here we report on the latest upgrades to the source, the accelerator itself and the micro-beam line that is used for continued development of Proton Beam Writing (PBW).

[1] M. Schwickert et al., Surface and Coatings Techn., 151/152, 222, 2002

[2] M. Uhrmacher et al., J. Alloys. Comp., 307, 404-406, 2005