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O: Fachverband Oberflächenphysik

O 22: Organic-Inorganic Hybrid Systems and Organic Films III

O 22.1: Vortrag

Montag, 20. März 2017, 17:00–17:15, WIL A317

Focused Electron Beam Induced Processing on Surface-Anchored Metal-Organic Frameworks — •Martin Drost¹, Luisa Berger¹, Fan Tu¹, Christian Preischl¹, Hartmut Gliemann², Christof Wöll², and Hubertus Marbach¹ — ¹Physik. Chemie II, FAU Erlangen-Nürnberg, GER — ²Institut f. funktionelle Grenzflächen, KIT, GER

We demonstrate the feasibility of Focused Electron Beam Induced Processing (FEBIP) techniques on Surface-Anchored Metal-Organic frameworks (SURMOFs)1 to lithographically fabricate nanostructures. These are: Electron Beam Induced Deposition (EBID)2, in which adsorbed precursor molecules are locally dissociated by the impact of the electron beam, leaving a deposit on the surface, and Electron Beam Induced Surface Activation (EBISA)3, where the substrate is locally activated by the e-beam in the absence of a precursor, such that a subsequently dosed precursor is catalytically decomposed at these sites and forms a deposit. Both approaches were conducted with Fe(CO)5 and Co(CO)3NO on HKUST-1 and a porphyrin-based SURMOF. We show that Fe(CO)5 is suitable for EBID and EBISA on both SURMOFs, whereas Co(CO)3NO works solely for EBID but is not susceptible to EBISA. We also demonstrate the possibility to fabricate nanostructures with linewidths <10 nm. All deposits were characterized with Scanning Electron Microscopy (SEM) and local Auger Electron Spectroscopy (AES). Supported by the DFG through grant MA 4246/1-2, research unit FOR 1878/funCOS; COST Action CM1301; Excellence Cluster EAM of the FAU Erlangen-Nürnberg.