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O: Fachverband Oberflächenphysik
O 56: 2D Materials beyond Graphene
O 56.14: Poster
Dienstag, 21. März 2017, 18:30–20:30, P2-EG
Investigation of sputter processes on metalic surfaces and 2D-Materials using Time-of-Flight mass spectroscopy — •Stephan Sleziona1, Philipp Ernst1, Matthias Herder2, Andreas Wucher2, and Marika Schleberger1 — 1Universität Duisburg-Essen, AG Schleberger, Germany — 2Universität Duisburg-Essen, AG Wucher, Germany
We have investigated the sputtering processes and ionization probability of metallic surfaces (Indium and Molybdenum) irradiated by two different kinds of ions. We used highly charged ions (HCI), i.e. Xe30+ Ions (Epot= 15 keV and Ekin= 180 keV) , and singly charged Ar-Ions with kinetic energy of Ekin= 4 keV. While the interaction of the latter with the solid is dominated by nuclear stopping the interaction of HCIs consist partly of electronic stopping, too. To study the differences, the Indium surface was irradiated by both types of ions and Time-of-Flight (ToF) mass spectra were recorded. In order to do so we optimized the spatial positions of the Argon-Gun, the HCI source,the spectrometer, and the laser, which was used to post-ionize secondary neutral particles . In addition, the operating voltages and timings of the different components were optimized. With this new set-up we obtained ToF spectra which show a significant difference between the two types of ions. Most recently we used this technique to investigate sputter processes of 2D-Materials.