Dresden 2017 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 73: Nanostructures at Surfaces: Metals, Oxides and Semiconductors III

O 73.6: Vortrag

Mittwoch, 22. März 2017, 11:45–12:00, REC/PHY C213

Grazing Incidence Small-Angle X-Ray Scattering on Small Sample Volumes Using Large Beams — •Mika Pflüger¹, Victor Soltwisch¹, Jürgen Probst², Frank Scholze¹, and Michael Krumrey¹ — ¹Physikalisch-Technische Bundesanstalt, Abbestraße 2-12, 10587 Berlin, Germany — ²Helmholtz-Zentrum Berlin, Albert-Einstein-Straße 15, 12489 Berlin, Germany

Grazing Incidence Small-Angle X-Ray Scattering (GISAXS) is a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incident angles used in GISAXS, the spotsize of X-ray beams on the sample is significantly elongated compared to the beam height. Traditionally, this has limited GISAXS measurements to long (several mm) samples. We will present GISAXS measurements of lamellar gratings in Si, with line lengths down to 4 µm. First, we present measurements of single grating targets on an otherwise empty substrate. Using a modified reciprocal-space construction of the intersection of the Ewald sphere with the grating we are able to quantitatively describe the recorded scattering patterns.

For most applications, such as metrological fields in semiconductor manufacturing, target structures are not completely isolated on the sample. We demonstrate that the scattering from the µm sized targets can be separated in reciprocal space from the scattering of the surrounding structures. The possibility to measure very small targets opens GISAXS for new applications in nanoscience and industry.