Dresden 2017 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 1: Vacuum Generation and Measurement

VA 1.3: Vortrag

Montag, 20. März 2017, 10:15–10:45, HSZ 301

New technologies for dry and clean vacuum — •Alexander Kaiser — Leybold GmbH, Bonner Str. 498, 50968 Köln

The history of vacuum goes back several centuries and is characterized by large and noisy machines that have the potential to pollute the environment and the vacuum chamber with oil and particles. While several high and ultra-high vacuum pumping principles offer suitable hydrocarbon-free clean pumping, there are still compromises with today's fore-vacuum pumps, which are becoming increasingly unacceptable in many research applications.

The ideal vacuum pump is a reliable tool providing clean vacuum with low operational noise, low power consumption and runs maintenance-free. Today, this can be achieved by pumps based on screw or multi-stage roots technology where optimized rotors rotate in an oil-free compression suction chamber without generating friction. Because of the non-contacting oil-free operation, no wear is produced and neither oil nor particles can contaminate the vacuum chamber and the environment. By optimizing the rotor design and vacuum channels, the pumps can be designed to run almost noise free with no disturbance for the user and with highest energy-efficiency.

This talk gives an overview of dry and clean vacuum pump technologies and the current challenges and solutions in developing a pump almost not audible for the operator.