Dresden 2017 – scientific programme

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 3: Vacuum Physics

VA 3.2: Talk

Monday, March 20, 2017, 14:15–14:45, HSZ 301

A Novel Ion Source: Theory, Experiments and Applications — •Mihail Granovskij, Sergej Uchatsch, Anton Zimare, Christian Reinhardt, Jaroslaw Iwicki, Michael Flämmich, and Ute Bergner — VACOM Vakuum Komponenten & Messtechnik GmbH, Gabelsbergerstraße 9, 07749 Jena

Pressure determination in HV/UHV-processes is generally carried out with well-known hot or cold cathode gauges. While these gauges are reliable in practice, users often face problems achieving the desired operating pressure. Most likely this is caused by leaks which can be identified with a separate leak detector or mass spectrometer. While leak detectors are highly cost-intensive, the application of mass spectrometers seems to be oversized since only the Helium signal is relevant.

Merging the capabilities of total pressure gauges with the basic performance of a mass spectrometer is an approach we present in the present talk. Our novel, simple and compact ion source is simultaneously capable of both: a precise total pressure measurement over a wide range and the determination of Helium partial pressure with a high dynamic range in the UHV without the usage of a cost-intensive electron multiplier.

In the talk we explain the physical principles of the novel ion source. We show experimental results, and provide insights into the overall performance of the gauge. Moreover, we evaluate the capability of detecting the gas composition in the range of 1-50 m/z.