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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 4: Poster Session

VA 4.6: Poster

Montag, 20. März 2017, 14:45–16:00, P2-OG3

Testing all-aluminum CF chambers for UHV applications — •Maximilian Biethahn, Sophie Gottschall, René Bauer, Michael Flämmich, and Ute Bergner — VACOM Vakuum Komponenten & Messtechnik GmbH, Gabelsbergerstraße 9, 07749 Jena

Stainless steel and aluminum are the most widely used materials in vacuum technology - still with the balance more on the stainless steel side. However, aluminum has some strong advantages over stainless steel, e.g.: it is lightweight, it has a very low relative magnetic permeability (approx. 1) and it shows very low outgassing in unbaked and in-situ baked condition.

In this talk, metal-sealed CF vacuum components and chambers made from aluminum are discussed. In this context, adequate knife edge stability, temperature stability and reliable outgassing properties have always been debated as major challenges. Based on detailed experimental studies it will be shown that these challenges have been solved lately. It will be shown that the knife edges are stable for hundreds of closures and outgassing rates below 2E-14 mbar*l/s/cm2 are achieved after very moderate bake-out conditions (24 h at 120 °C). Because the flange connection system is designed according ISO/TS 3669-2 (Bakeable flanges: Dimensions of knife-edge flanges), it can be easily used with conventional stainless steel flanges and chambers. By this means, Aluminum-CF components and chambers based on the AluVaC(R) technology are today a serious alternative to the established components made from stainless steel.