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A: Fachverband Atomphysik
A 16: XUV/X-ray spectroscopy III
A 16.4: Talk
Tuesday, March 7, 2017, 15:30–15:45, N 2
Optical and EUV spectroscopy of complex open 4d-shell Sn7+..14+ ions — •Hendrik Bekker1, Francesco Torretti2, 5, Alexander Windberger1, 2, Alexander Ryabtsev3, 4, Stepan Dobrodey1, Wim Ubachs2, 5, Ronnie Hoekstra2, 6, Anastasia Borschevsky8, Emily V. Kahl7, Julian C. Berengut7, José R. Crespo López-Urrutia1, and Oscar O. Versolato2 — 1Max-Planck-Institut für Kernphysik, Heidelberg — 2Advanced Research Center for Nanolithography, Amsterdam — 3Institute of Spectroscopy, Russian Academy of Sciences, Troitsk — 4EUV Labs, Ltd., Troitsk — 5Department of Physics and Astronomy, and LaserLaB, VU, Amsterdam — 6Zernike Institute for Advanced Materials, University of Groningen — 7School of Physics, University of New South Wales, Sydney — 8The Van Swinderen Institute, University of Groningen
We present the analysis of the level structure of Sn7+..14+ ions with their many-valence-electron open [Kr]4dm shell (m=7-0). These are essential in bright extreme-ultraviolet (EUV) plasma-light sources for next-generation nanolithography, but their complex electronic structure is an open challenge for both theory and experiment. We combine charge-state-resolved optical and EUV spectroscopy in an electron beam ion trap with state-of-the-art calculations using configuration-interaction many-body perturbation theory. Line identifications were performed employing semi-empirical calculations using the orthogonal parameters technique and cowan code calculations. The results represent the most complete data available to date and suggest that some EUV line identifications in previous work need to be revisited.