Mainz 2017 – wissenschaftliches Programm
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Q: Fachverband Quantenoptik und Photonik
Q 40: Poster: Quantum Optics and Photonics II
Q 40.32: Poster
Mittwoch, 8. März 2017, 17:00–19:00, P OG2
Asymmetry induced resonances for performance prediction of short wavelength periodic nanostructures — •Carol Bibiana Rojas Hurtado1, 2, Johannes Dickmann1, 2, Thomas Siefke1, 3, and Stefanie Kroker1, 2 — 1Physikalisch-Technische Bundesanstalt — 2Technische Universität Braunschweig — 3Friedrich-Schiller-Universität Jena
Nano-optical elements for applications at short wavelengths are subject to strict requirements with respect to structural accuracy. Even deviations in the range of a few nanometers can have a considerable impact on the optical performance of the related elements. In this contribution, we investigate asymmetry induced guided mode resonances (GMR) as a measure for structure deviations in nano-optical wire grid polarizers made of titania. Hereby, the structural asymmetry arises from the self-aligned double patterning process - a well-established technique for the realization of structures with small periods. The guided mode resonances yield information about the structure geometry and enable the prediction of the polarizer performance at short wavelengths < 200 nm. Thus, easily accessible reflectance and transmission spectral measurements at a wavelength around 370 nm can replace an elaborate optical characterization in the DUV region. An additional advantage of this method is that no calibration is necessary which promises high application potential as in-situ tool. Furthermore, the presented method can be extended to applications at even shorter wavelengths down the extreme ultraviolet spectral region as well as to 2D periodic structures of versatile shape.