Berlin 2018 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 11: Thin Film Properties: Structure, Morphology and Composition (XRD, TEM, XPS, SIMS, RBS, AFM, ...): Session II

DS 11.10: Vortrag

Dienstag, 13. März 2018, 12:00–12:15, H 0111

Epitaxial Ag thin films grown on biaxially textured IBAD-MgO template layers — •Sebnem Yazici¹ and Matthias Wuttig² — ¹I. Physikalisches Institute, RWTH Aachen, Germany — ²I. Physikalisches Institute, RWTH Aachen, Germany

The heteropitaxial growth of thin metal films on ceramic substrates is of great scientific and industrial interest, due to their applications in electronic interconnects as well as catalysis and optical coating applications. Therefore, it is very important to examine the growth mechanism of the metal layer including wetting behavior to control crystalline properties and to determine the grain orientations as well as strain relaxations and electron transport mechanisms.

Biaxially ordered films produced by ion beam assisted deposition (IBAD) provides good templates for the heteroepitaxial growth of the functional layers. MgO is a very promising template layer for epitaxial Ag thin film growth since MgO can be deposited with rapid biaxial texture formation via IBAD technique. Besides, very similar in-plane lattice constants of Ag(100) and MgO(100), results in 4-fold symmetric cube-on-cube epitaxy. In this work, Ag thin films were deposited via magnetron sputtering on IBAD-MgO layers in order to study epitaxial relationship and electron transport mechanism of very thin Ag films. Biaxial texture formation in MgO layer depending on MgO layer thickness was investigated. Additionally, effects of post deposition annealing on Ag films grown on IBAD MgO films were analysed regarding crystallinity-texture improvement, stress relaxation and surface roughness via high resolution X-ray diffraction and AFM, respectively.