Berlin 2018 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 17: Poster Session I
DS 17.25: Poster
Dienstag, 13. März 2018, 18:15–20:15, Poster B
A Variable Gas Injection System for Rapid Precursor Testing in Focused Electron Beam Induced Deposition — •Robert Winkler1,2, Georg Arnold1,2, Juergen Sattelkow1,2, Andrew Smith3, and Harald Plank1,2 — 1Institute for Electron Microscopy and Nanoanalysis Graz University of Technology, 8010 Graz, Austria — 2Graz Centre for Electron Microscopy, 8010 Graz, Austria — 3Kleindiek Nanotechnik GmbH, Aspenhaustrasse 25, 72770 Reutlingen, Germany
Focused electron beam induced deposition (FEBID) is an additive, direct-write technology for the controlled on-demand fabrication of functional nano-structures on virtually any given material and surface morphology. Beside the strong current trend towards true 3D nano-fabrication with yet unpreceded flexibility, the material aspect is gaining increasing importance as the functionality finally decides about the applicability in research and development. From a chemical point of view, there was very strong progress during the last 3 years in the frame of the EU COST action CELINA, which brought essential insights and introduced new precursors. Those, however, need to be tested in an iterative fashion where technical flexibility is one of the highest demands. In this contribution we focus on a versatile and flexible gas injection system for rapid precursor testing of new materials. We also discuss how the system can be used for other exposure experiments such as purification or sensor applications. As we will show, the system provides unique advantages and an uncomplicated handling as essential element for further progress in the field of FEBID.