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DS: Fachverband Dünne Schichten

DS 17: Poster Session I

DS 17.26: Poster

Dienstag, 13. März 2018, 18:15–20:15, Poster B

Investigation and utilization of catalytic processes in FEBIP techniques for nanofabrication — •Elif Bilgilisoy, Christian Preischl, Florian Vollnhals, and Hubertus Marbach — Lehrstuhl für Physikalische Chemie II, Friedrich-Alexander University Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen

In our group, we use and investigate Focused Electron Beam Induced Processing (FEBIP) techniques ultra-high vacuum (UHV) to fabricate arbitrary shaped nanostructures. Therefore, we use the highly focused electron beam of a scanning electron microscope in UHV to either directly modify adsorbed precursor molecules (electron beam induced deposition, EBID) or to locally modify the substrate such that it becomes active towards the decomposition of subsequently dosed precursor molecules (electron beam induced surface activation, EBISA) [1]. In the corresponding experiments with the precursors Fe(CO)₅ and Co(CO)₃NO we observed diverse catalytic processes, like precursor decomposition at the pristine substrate, autocatalytic growth and decomposition on deposits of the other precursor. We will present and discuss the corresponding observations, e.g., the partially very different chemical sensitivities of the two precursors, the possibility to quench the catalytic activity of a surface by the preparation of organic layers and in particular how to exploit the findings for the improvement of FEBIP [2].

[1]H. Marbach, Appl. Phys. A 117 (2014), 987

[2]Drost et al., Small Methods, 1 (2017) 1700095