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DS: Fachverband Dünne Schichten

DS 17: Poster Session I

DS 17.61: Poster

Dienstag, 13. März 2018, 18:15–20:15, Poster B

Large-scale spray deposition of carbon nanotube-based thin-film devices — •Florin-Cristian Loghin¹, Aniello Falco², Marco Bobinger¹, Alaa Abdellah¹, Markus Becherer¹, Paolo Lugli², and Almudena Rivadeneyra¹ — ¹Institute for Nanoelectronics-Technische Universität München, Munich, Germany — ²Free University of Bozen-Bolzano, Bozen-Bolzano, Italy

Due to their remarkable electrical and mechanical characteristics, Carbon nanotubes (CNTs) are ideal candidates for a wide range of applications. The possibility to fabricate CNT thin-films via solution processing techniques has enabled the way to low-cost CNT thin-film devices including thin-film transistors (TFTs) and circuits, thermal and chemical sensors as well as transparent conductive films (TCFs). In this contribution, we report on a spray deposition technique, which can produce uniform, reproducible thin-films suitable for a wide range of applications. The use of non-invasive solvents (DI-H2O) as well as low processing temperatures (<65°C) permits for the process to be easily integrated into existing technology platforms. Furthermore, the resolution down to 10 CNTs/um2 per deposited layer allows for precise device engineering. In order to better display this technology, proof of concept devices were fabricated and characterized, including TFTs, chemical sensors and TCFs.