Berlin 2018 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 17: Poster Session I

DS 17.62: Poster

Dienstag, 13. März 2018, 18:15–20:15, Poster B

Pulsed Laser Deposition of PbZr_0.52Ti_0.48O₃ thin films on stainless steel — •Juliette Cardoletti, Aldin Radetinac, Philipp Komissinskiy, and Lambert Alff — Technische Universität Darmstadt, Institute of Materials Science, Alarich-Weiss-Straße 2, 64287 Darmstadt, Germany

With the acute need for miniaturisation of devices and components, the use of bending tongues (cantilevers or wider beams) based on piezoelectric ceramics is increasing. Up to date most devices are created by gluing piezoelectric elements onto metallic structures with epoxy.

Some papers present a new solution by depositing a PbZr_0.52Ti_0.48O₃ (PZT) thin film by sol-gel on nickel foils using HfO₂ and LaNiO₃ (LNO) as buffer layers [1].

This work aims to deposit PZT and LNO thin films on stainless steel by Pulsed Laser Deposition (PLD). Using a physical vapour deposition method potentially allows for a better process control and is better applicable to microelectromechanical systems (MEMS).

[1] H.G. Yeo and S. Trolier-McKinstry, J. Appl. Phys. 116, 014105 (2014).