Berlin 2018 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 18: Optical Analysis of Thin Films (Reflection, Ellipsometry, Raman, IR-DUV Spectroscopy, ...): Session I
DS 18.3: Vortrag
Mittwoch, 14. März 2018, 10:30–10:45, H 0111
Infrared spectroscopic ellipsometry of trapezoidal SiO2 columns and protein coated lamellar gratings — •Cordula Walder1, Andreas Furchner1, Matthias Zellmeier2, Jörg Rappich2, Helge Ketelsen3, and Karsten Hinrichs1 — 1Leibniz Institut für Analytische Wissenschaften ISAS e.V., Schwarzschildstraße 8, 12489 Berlin — 2Helmholtz Zentrum Berlin für Materialien und Energie GmbH, Institut für Silizium Photovoltaik, Kekuléstraße 5, 12489 Berlin — 3SENTECH Instruments GmbH, Schwarzschildstraße 2, 12489 Berlin
The in-situ ellipsometric characterization of structured surfaces is interesting for applications like light management in solar cells, biotemplates and biosensors. In this work we aim to enhance the understanding of the results for periodic micrometer-sized structures in the infrared spectral regime where the vibrational fingerprints of the investigated materials become visible. Two-dimensional SiO2 trapezoidal columns on silicon with periods from 10 to 20 um in both lateral directions were characterized. The infrared Müllermatrix spectra of these samples were modelled by RCWA for different azimuth angles of sample rotation. Simulations show that the off-diagonal Müllermatrix elements can be particularly sensitive to changes of the lengths of the trapezoids and the azimuth angle. As an example for a structured biohybrid interface SiO2 line gratings on silicon wafers were coated with monolayers of human serum albumin (HSA protein). Analysis of the ellipsometric spectra delivered structural properties as well as the vibrational bands of the nanometer-thin protein layer.