Berlin 2018 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 19: Lithography I: Focused Electron Beam Induced Processing: 3D Nano-Printing for Material Science (Focussed Session): Morning Session (joint session DS/KFM)

DS 19.3: Hauptvortrag

Mittwoch, 14. März 2018, 10:30–11:00, H 2032

Chemistry for ELectron-Induced NAnofabrication — •Petra Swiderek — University of Bremen, Institute for Applied and Physical Chemistry, Bremen, Germany

The European COST Action CELINA (Chemistry for ELectron- Induced NAnofabrication [1]) has, from 2013 to 2017, created a research network that aims at advancing focused electron beam induced deposition (FEBID) processes. It has done so by stimulating collaborative research that unravels the chemical reactions that are fundamental to FEBID, develops novel and improved precursor molecules, and tests their performance in the actual FEBID process. CELINA has thus assembled under its roof groups with expertise in electron-driven chemistry, precursor synthesis, and experts in FEBID from both academia and industry. This multidisciplinary effort is needed because of the many different physical and chemical aspects involved in the formation and processing of FEBID deposits as well as in their applications.

This contribution gives an overview of CELINA*s research program and highlights some of its results. Furthermore, it will discuss the different types of chemical processes inherent in FEBID and how they can be investigated using a combination of gas phase mass spectrometry and surface science experiments. Understanding and controlling each of these different chemistries poses significant challenges but is the key to ultimate deposit purity, spatial resolution, and deposition speed.

References: [1] http://celina.uni-bremen.de/celina