Berlin 2018 – scientific programme

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DS: Fachverband Dünne Schichten

DS 23: Lithography II: Focused Electron Beam Induced Processing: 3D Nano-Printing for Material Science (Focussed Session): Afternoon Session (joint session DS/KFM)

DS 23.11: Talk

Wednesday, March 14, 2018, 17:45–18:00, H 2032

Coordination compounds for focused electron beam induced deposition (FEBID) — •Iwona Szymańska. and Katarzyna Madajska — Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland

Focused electron beam induced deposition is a direct maskless nanolithography technique. The compounds applied as FEBID precursors should effectively generate volatile metal carriers, which are transported over a substrate. Next, they are irradiated by high-energy electrons and decompose forming nanomaterials [1]. Copper and silver exhibit high electrical and thermal conductivity and are extensively used in microelectronics.

Copper and silver carboxylate compounds were applied as CVD precursors [2,3]. Carboxylates are able to coordinate as monodentates, chelates, and bridges forming complexes of diverse nuclearity. Secondary ligands enable manipulating physicochemical parameters of precursors. Research was focused on the copper(II) and silver(I) carboxylate compounds, which seems to be promising for a FEBID process. The usefulness of a thermal analysis, EI MS spectrometry, and VT IR spectroscopy for the FEBID precursors selection was evaluated. The secondary ligand influence was studied basing on primary amines. Acknowledgements: The authors wish to thank Nicolaus Copernicus University in Toruń (Statute Research no.103) for a financial support.

References: [1] I. Utke et al., Angewandte Chemie Int. Ed., 49 (2010) 9328; [2] A. Grodzicki et al., Coord. Chem. Rev., 249 (2005) 2232; [3] I.B. Szymańska,, Polyhedron, 65 (2013) 82.