Berlin 2018 – scientific programme
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DS: Fachverband Dünne Schichten
DS 23: Lithography II: Focused Electron Beam Induced Processing: 3D Nano-Printing for Material Science (Focussed Session): Afternoon Session (joint session DS/KFM)
DS 23.8: Talk
Wednesday, March 14, 2018, 17:00–17:15, H 2032
Fabrication of multi-component nanostructures by FEBID — •Fabrizio Porrati1, Roland Sachser1, Sven Barth2, Gian Carlo Gazzadi3, Stefano Frabboni3, Christian Gspan4, Harald Plank4, Andreas Terfort5, and Michael Huth1 — 1Goethe-Universität, Institut of Physics, Frankfurt am Main, Germany — 2TU Vienna, Institute of Materials Chemistry, Wien, Austria — 3University of Modena and Reggio Emilia, FIM Department, Modena, Italy — 4TU Graz, Institute for Electron Microscopy and Nanoanalysis, Graz, Austria — 5Goethe-Universität,Institute for Inorganic and Analytical Chemistry, Frankfurt am Main, Germany
The fabrication of multi-component polycrystalline or granular metals by FEBID represents a challenging research approach for the design of novel nanostructured materials. Currently, there are three different approaches for the fabrication of multi-component FEBID nanostructures: 1. deposition by single source heteronuclear precursors; 2. codeposition using two different precursors; 3. intermixing of multilayer nanostructures fabricated with different precursors by low-energy electron irradiation. These fabrication approaches allow the fabrication of a large number of tunable alloy nanostructured and intermetallic compounds. In this contribution, we present some examples of binary and ternary nanostructures fabricated by following these routes. In particular, we report on the fabrication, the structural characterization and magnetotransport measurements of CoFe alloys and Co2FeSi Heusler compounds.