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DS: Fachverband Dünne Schichten

DS 27: New Twists for Nanoquakes on a Chip - Emerging Applications of Surface Acoustic Waves in Condensed Matter Physics (Focussed Session): Session I

DS 27.10: Vortrag

Donnerstag, 15. März 2018, 13:00–13:15, H 2032

Zero-group-velocity acoustic waveguides for high-frequency resonators — •Muhammad Hamidullah and Cinzia Caliendo — Institute of Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy

Zero group velocity (ZGV) Lamb-like modes resonator based on a silicon-on-insulator (SOI)/AlN suspended thin film was simulated to design high-frequency electroacoustic resonators that do not require metal strip gratings or suspended edges to confine the acoustic energy. The electroacoustic standing wave can be obtained with only one interdigital transducer (IDT) and no reflectors, thus reducing both the device size and the technological complexity. The ZGV resonant conditions in the SOI/AlN composite plate, i.e. the frequencies where the mode group velocity vanishes while the phase velocity remains finite, were investigated in the frequency range from few hundreds of MHz up to 1900 MHz with the wavelength range from 50 um to 22 um. Phase velocity at ZGV resonant condition (>15000m/s) is higher than bulk longitudinal phase velocity. By reducing the film thickness and the wavelength in sub-micrometer range, ultra-high frequency resonator with a resonant frequency higher than 10 GHz can be achieved. Furthermore, as the energy is locally trapped in the source area, these modes are expected to be highly sensitive to the plate thickness and mechanical properties changes, therefore, can be exploited for sensing application.

Keyword: Lamb wave, thin film, zero group velocity, SOI, AlN