Berlin 2018 – scientific programme

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DS: Fachverband Dünne Schichten

DS 29: Lithography III: Lithography and Structuring (joint session KFM/DS)

DS 29.7: Talk

Thursday, March 15, 2018, 12:10–12:30, EMH 025

Fabrication of metal nanostructures with focused X-rays — •Andreas Späth, Florian Vollnhals, Fan Tu, Hubertus Marbach, and Rainer H. Fink — Lehrstuhl für Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, Egerlandstr. 3, D-91058, Erlangen, Germany

Focused X-ray beam induced deposition (FXBID) is a novel technique for the fabrication of metallic nanostructures by illuminating gas phase precursors with focused soft X-rays in a zone plate based scanning transmission X-ray microscope (STXM). With this technique we have been able to produce localized Co and Mn nanostructures with growth rates and purity competitive with electron beam induced deposition (EBID) [1,2]. We demonstrate that our approach exhibits significant selectivity with respect to incident photon energy leading to enhanced deposition for resonant excitation of the precursor molecule. This finding opens a new field of photon energy selective deposition from precursor mixtures and deposition from various precursors within one production cycle. The impact of several deposition parameters on the growth rate, such as illumination time and precursor pressure are discussed with respect to a deeper understanding of deposition processes and optimization of the procedure. Furthermore, we discuss routes to the formation of magnetic deposits by in-situ cleaning techniques (e.g., co-dosing of reactive gases or annealing). The project is funded by the BMBF (05K16WED).

[1] A. Späth et al., RSC Advances, 2016, 6, 98344.

[2] F. Tu et al., J. Vac. Sci. Technol. B, 2017, 35(3), 031601.