Berlin 2018 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 31: Poster Session II

DS 31.11: Poster

Donnerstag, 15. März 2018, 11:15–13:15, Poster F

Characterization and optimization of rf sputtered LiCoO₂ thin films by post thermal annealing — •Marcel Couturier, Fabian Michel, Philipp Schurig, and Angelika Polity — Justus Liebig Universität, 35392 Gießen

LiCoO₂ thin films have been grown by rf-magnetron-sputter-deposition on platinum coated quartz substrates. The films were annealed at 700 ^∘C for several hours in different atmospheres such as vacuum or under flux of oxygen to create phases which are favorable for battery applications. For structural characterization X-ray diffraction and Raman spectroscopy were used. HT-LiCoO₂-films with (003)-orientation after annealing under flowing oxygen and Co₃O₄-films with (311)-orientation after annealing in a vacuum could be observed. Furthermore, the stoichiometry could be determined using X-ray photoelectron spectroscopy, revealing a weak lithium deficiency in the grown films. Additional parasitic lithium phases near the surface of the films could be observed by analysis of the Li 1s photoelectron signal. Scanning electron microscopy images have shown changes in the surface morphologies of the films after undergoing the heat-treatment. Grains have slightly increased their volume. Moreover the shape changes after the annealing process in comparison to the untreated samples.