Berlin 2018 – scientific programme

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DS: Fachverband Dünne Schichten

DS 31: Poster Session II

DS 31.12: Poster

Thursday, March 15, 2018, 11:15–13:15, Poster F

Deposition and optimization of a LiCoO₂ cathode layer for battery applications — •Sebastian Leonard Benz, Martin Becker, Christian Reindl, Angelika Polity, and Peter J. Klar — Justus Liebig Universität, 35392 Gießen

This work is about the deposition and characterization of Lithium Cobalt Oxide (LCO) thin films, deposited by rf magnetron sputtering. Different sputter process parameters such as gas flux, sputter power, deposition time and gas composition were considered. In addition, the influence of the used substrate was investigated. Different materials like glass, sapphire and metals were used as substrates. The main aim was to optimize the growth parameters for battery applications of LCO. Mostly X-ray-diffraction (XRD), as well in Bragg-Brentano as in four-circle geometry, was used to characterize the crystal structure and especially the out-of-plane orientation of the deposited thin films. By varying the parameters mentioned above, a (012) orientation has been achieved. Moreover, scanning electron microscopy (SEM) has been used to characterize the surface morphology. Furthermore, Raman spectroscopy gave insights into the crystal structure.