Berlin 2018 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 31: Poster Session II
DS 31.23: Poster
Donnerstag, 15. März 2018, 11:15–13:15, Poster F
A route to epitaxial growth of periodic metal nanostructure arrays — •Denise Erb1, Gerald Malsch1,2, René Hübner1, Kilian Lenz1, Jürgen Lindner1, Stefan Facsko1, Manfred Helm1,2, and Jürgen Fassbender1,2 — 1Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Dresden (Germany) — 2Technical University Dresden, Institute of Solid State Physics, Dresden (Germany)
Epitaxial thin film growth on planar substrate surfaces is well-established for many materials. We show that it can also be feasible to grow nanostructures in an oriented manner on nanopatterned crystalline surfaces. Produced by a scalable procedure on large surface areas, such nanostructure arrays may find diverse applications in research and technology. On semiconductor substrates, nanoscale surface patterns with well-defined lateral periodicity form under low-energy ion irradiation via non-equilibrium self-assembly of vacancies and ad-atoms [1]. For appropriate process temperatures, the crystallinity of the substrate is retained during ion irradiation. When a material is then deposited onto the substrate by PVD under non-normal incidence, shadowing effects give rise to the formation of separated nanostructures [2], while a suitable lattice matching can induce epitaxial growth. In this contribution, we outline the patterning and growth procedure. As an example, we will present periodic Fe/Au nanostructure arrays and discuss their strongly anisotropic optical and magnetic properties. [1] X. Ou et al., Nanoscale 7, 18928 (2015) [2] Q. Jia, et al., Nano Research 15, 1 (2017)