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DS: Fachverband Dünne Schichten
DS 31: Poster Session II
DS 31.6: Poster
Donnerstag, 15. März 2018, 11:15–13:15, Poster F
The impact of various substrate pretreatments on the growth of chalcogenide thin films — •Brigitte Baumkötter1, Matthias M. Dück1, and Matthias Wuttig1,2 — 1I. Physikalisches Institut (IA), RWTH Aachen University, D-52056 Aachen, Germany — 2JARA-FIT, RWTH Aachen University, Germany
Phase change materials (PCMs) are remarkable due to a unique combination of optical and electrical properties featuring a strong contrast between the crystalline and the amorphous phase. These characteristics have been used for optical data storages for a long time and are now about to revolutionize the field of electronic non-volatile memories.
The microstructure of a thin film may influence its properties, and is therefore an obstacle for measurements of reproducible material properties. However, utilizing thin films is mandatory due to the strong disorder dependence of many PCMs, which cannot be easily reproduced in a single crystal. Due to the anisotropic structure of materials from the pseudo-binary line GeTe-Sb2Te3 (GSTs) orientation dependent measurements are of special interest. Especially infrared spectroscopy enables new insights on the effect of disorder, which induces a metal to insulator transition in several PCMs of this class.
Besides texture, two major requirements for optical measurements are a thick film of around 500 nm and a low surface roughness. Therefore, an optimized thick film with a strong texture and a smooth surface is necessary. As the substrate and its surface has a crucial influence on the structure of grown films, this study focuses on the influence of different substrate pretreatments on the film quality.