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DS: Fachverband Dünne Schichten

DS 7: Thin Film Properties: Structure, Morphology and Composition (XRD, TEM, XPS, SIMS, RBS, AFM, ...): Session I

DS 7.1: Vortrag

Montag, 12. März 2018, 15:00–15:15, H 2032

Stoichiometry determination of chalcogenide superlattices by means of X-ray diffraction and its limits — Felix R. L. Lange^1,2, Henning Hollermann¹, Stefan Jakobs¹, •Peter Kerres¹, and Matthias Wuttig^1,2 — ¹I. Physikalisches Institut (IA), RWTH Aachen University, 52056 Aachen Germany — ²JARA-FIT Institute Green-IT, RWTH Aachen University and Forschungszentrum Jülich, 52056 Aachen, Germany

In this study we explore the potential of stoichiometry determination of GeTe/Sb₂Te₃ superlattices (CSLs) by means of X-ray diffraction (XRD). For this purpose a series of sputter-deposited CSLs with varying ratios of the GeTe and Sb₂Te₃ layer thicknesses is analyzed. Kinematical scattering theory is applied to link the change in average chemical composition with the specific CSL diffraction features. It is found that the lattice parameters of the reference unit cell of the superlattice follow Vegards law, which allows for a straight-forward model for stoichiometry determination.