Berlin 2018 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 7: Thin Film Properties: Structure, Morphology and Composition (XRD, TEM, XPS, SIMS, RBS, AFM, ...): Session I

DS 7.6: Vortrag

Montag, 12. März 2018, 16:30–16:45, H 2032

Effect of stress on structural properties of Fe/Cr multilayers. — •Magnifouet Tchinda Gladice Claire, Dacosta Manu, Meny Christian, and Pierron-Bohnes Véronique — 23 rue du Loess, 67200 Strasbourg

Cr/Fe/Cr tri-layers were deposited by sputtering with an average total thickness of 100nm on MgO(100) and STO(100) substrates. In order to have good epitaxy, the first chromium was deposited at high temperature (400°C), iron at 400°C, 300°C, 200°C and room temperature and; the capping chromium at room temperature. X-ray diffraction is used to study the structure of Cr/Fe/Cr tri-layer. Both the specular scan and pole figure mapping showed good epitaxy of the films along the [100] direction when the temperature of the deposited iron is low (200°C and room temperature). Presence of the residual strain was quantified by *sinus2 * method*. This method revealed that the values of the free lattice stress parameter determined on the tri-layers are sometimes low or high compare to the massive one as I will show it during the presentation.